This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2020-2025.
Company Filing History:
Years Active: 2020-2025
Title: Kuo-Sheng Lien: Innovator in Semiconductor Technology
Introduction
Kuo-Sheng Lien is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on enhancing the efficiency and effectiveness of semiconductor processing tools.
Latest Patents
Kuo-Sheng Lien's latest patents include an innovative exhaust piping system for a semiconductor processing tool. This tool features a processing tank and an arm designed to hold multiple wafers in a horizontally stacked arrangement. A fan is positioned above the arm to facilitate airflow across the wafer surfaces, directing it vertically toward the processing tank. The exhaust system comprises at least one exhaust output and several exhaust pipe segments that encircle the processing tank, equipped with openings to capture exhaust air for efficient removal.
Another notable patent is a method for adjusting etching parameters in integrated circuit (IC) manufacturing. This etching method involves retrieving processing data, including pattern density and etching parameters. It determines endpoint time by referencing historical data and adjusts the etching parameters accordingly to optimize the etching process for semiconductor devices.
Career Highlights
Kuo-Sheng Lien is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading entity in the semiconductor industry. His role involves developing advanced technologies that contribute to the efficiency of semiconductor manufacturing processes.
Collaborations
Kuo-Sheng Lien has collaborated with notable colleagues, including Shih-Ta Yu and Yung-Ho Chen. Their combined expertise has fostered innovation and progress in semiconductor technology.
Conclusion
Kuo-Sheng Lien's contributions to semiconductor technology through his patents and work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as a key innovator in the field. His advancements continue to shape the future of semiconductor processing.