Kunihiro Ito

Title: Kunihiro Ito: Pioneering Innovations in Lithography and Ferroelectric Materials

Introduction

Kunihiro Ito is a prominent inventor based in Tokyo, Japan, known for his innovative contributions to the fields of lithography and ferroelectric materials. With a total of two patents to his name, Ito has made significant advancements that address critical challenges in the industry.

Latest Patents

Ito's latest patents include a groundbreaking pellicle for lithography and a method for manufacturing pellicle film. The pellicle for lithography is designed to prevent haze generation on photomasks, even when subjected to high-energy laser applications such as an ArF excimer laser over extended periods. This innovative design features a frame-like structure with open frames on both sides, allowing effective attachment to photomasks. The pellicle film itself is laser beam transmissive and incorporates a venting hole that permits gas molecules to pass while blocking foreign particles. Additionally, he developed a method for preparing a ferroelectric substrate plate, which involves a unique surface-finishing process that results in a mirror-polished surface suitable for applications like SAW filter elements. This method improves uniformity in thickness and reduces warping, enhancing performance in electronic applications.

Career Highlights

Kunihiro Ito is affiliated with Shin-Etsu Chemical Co., Ltd., a leading company in the chemical and materials industry. Throughout his career, he has focused on the development of advanced materials that cater to the evolving needs of technology, particularly in semiconductor fabrication and electronic devices.

Collaborations

Ito has collaborated with notable colleagues such as Susumu Sakaguchi and Kenichi Taguchi. Their combined expertise has contributed to the successful innovation and implementation of patented technologies, further establishing Ito's reputation as a key player in his field.

Conclusion

In summary, Kunihiro Ito stands out as a significant inventor in the realm of lithography and ferroelectric materials. His innovative patents not only enhance existing technologies but also pave the way for future advancements in the semiconductor industry. With his ongoing contributions, Ito continues to play a vital role in shaping the landscape of material science and engineering.