This inventor holds 1 USPTO granted patent and 8 published patent applications. Top assignee: Tokyo Electron Limited. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Kunihiko Yamagata: Inventor in Plasma Processing Technology.
Introduction
Kunihiko Yamagata is an inventor based in Miyagi, Japan, and is associated with Tokyo Electron Limited. His work includes an invention for a plasma processing apparatus.
Latest Patents
Yamagata is credited with 1 patent, titled “Plasma Processing Apparatus.” The invention describes a plasma processing chamber and substrate support, along with a high-frequency power supply connected to an electrode or antenna. It also includes a power-consuming member, an electricity storage unit, and transmitting and receiving coils that transfer power. A metal case provides a shielded space for the coils, while ferrite material is positioned within that space.
Career Highlights
Yamagata’s patent reflects work on components for plasma processing equipment, including power transfer and shielding within a processing chamber. His association with Tokyo Electron Limited connects his inventive work to a company active in semiconductor manufacturing equipment.
Collaborations
The provided information lists Nozomu Nagashima and Daisuke Yoshikoshi as Yamagata’s coworkers. It does not specify their roles in the patent or whether they collaborated on this invention.
Conclusion
Kunihiko Yamagata’s recorded patent focuses on power management and shielding in a plasma processing apparatus, highlighting his contribution to semiconductor equipment technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile