Company Filing History:
Years Active: 2004-2006
Title: Innovations by Kun-Yu Liu in Semiconductor Technology
Introduction
Kun-Yu Liu is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on enhancing the detection and monitoring of defects in semiconductor wafers, which is crucial for improving manufacturing processes.
Latest Patents
Kun-Yu Liu's latest patents include innovative methods for monitoring semiconductor wafer defects below one nanometer. The first patent describes a method that facilitates the use of low-sensitivity monitoring equipment for detecting and monitoring defects on the surface of semiconductor wafers. This method employs a hydrofluoric acid solution to increase the dimensions of a defect and applies a thin-film layer of metal, such as titanium, to enhance the defect's appearance. This approach allows defect dimensions to exceed 0.1 nanometer, which is the detection threshold for economical low-sensitivity monitoring equipment.
The second patent presents a method for calculating real added defect counts. This method involves determining a proper pre-process sensitivity through a map-to-map process, maximizing the summation of mapping and catching rates. After scanning the wafer with the appropriate pre-process sensitivity and recording the pre-process particle number, a manufacturing step is performed. The wafer is then scanned again with the most sensitive scale of post-process sensitivities, allowing for the calculation of the added defect count by subtracting the post-process particle number from the pre-process particle number.
Career Highlights
Kun-Yu Liu is currently employed at Macronix International Co., Ltd., where he continues to innovate in semiconductor technology. His work has been instrumental in advancing the capabilities of defect detection in semiconductor manufacturing.
Collaborations
He has collaborated with notable colleagues, including Wei-Ming Chen and Chun-Chieh Chen, contributing to a dynamic research environment that fosters innovation.
Conclusion
Kun-Yu Liu's contributions to semiconductor technology through his patents demonstrate his commitment to improving manufacturing processes. His innovative methods for defect detection are paving the way for advancements in the industry.