Kouji Ogura

Title: Kouji Ogura: Innovator in Substrate Processing Technologies

Introduction

Kouji Ogura is a prominent inventor based in Kumamoto, Japan, known for his significant contributions to substrate processing technologies. With a total of five patents to his name, Ogura has made notable advancements in methods and apparatuses that enhance the efficiency of substrate processing.

Latest Patents

Ogura's latest patents include a substrate processing apparatus and a mixing method. One of his innovative substrate processing methods involves generating a mixture liquid by combining a phosphoric acid aqueous solution with an additive that suppresses the precipitation of silicon oxide. This mixture is circulated through a path that includes a back pressure valve, allowing for effective processing. The method also details how the mixture liquid is sent to a processing bath while ensuring optimal conditions for silicon-containing compounds. Additionally, his mixing apparatus is designed to supply both phosphoric acid aqueous solutions and additives, facilitating a seamless mixing process that enhances fluidity and efficiency.

Career Highlights

Kouji Ogura has established himself as a key figure in the field of substrate processing while working at Tokyo Electron Limited. His work has been instrumental in developing technologies that are crucial for various applications in the semiconductor industry. His innovative approaches have not only improved processing methods but have also contributed to the overall advancement of substrate technology.

Collaborations

Ogura has collaborated with notable colleagues, including Jun Nonaka and Takao Inada. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas, further enhancing the development of new technologies in substrate processing.

Conclusion

Kouji Ogura's contributions to substrate processing technologies reflect his dedication to innovation and excellence. His patents and collaborative efforts continue to influence the industry, paving the way for future advancements.