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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11724235 B1

PDFFull Text
Date of Patent:
Aug. 15, 2023

Filed:

Mar. 12, 2020

Mixing apparatus, mixing method and substrate processing system

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Jun Nonaka, Koshi, JP;

Takao Inada, Koshi, JP;

Kouji Ogura, Koshi, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorney:

Pearne & Gordon LLP

Primary Examiner:

Elizabeth Insler

Int. Cl.
CPC ...
B01F 3/08 (2006.01); B01F 11/02 (2006.01); B01F 13/02 (2006.01); B01F 15/06 (2006.01); B01F 23/40 (2022.01); B01F 23/43 (2022.01); B01F 23/451 (2022.01); B01F 31/80 (2022.01); B01F 33/40 (2022.01); B01F 35/90 (2022.01); B01F 101/58 (2022.01);
U.S. Cl.
CPC ...
B01F 23/405 (2022.01); B01F 23/43 (2022.01); B01F 23/451 (2022.01); B01F 31/831 (2022.01); B01F 33/402 (2022.01); B01F 35/90 (2022.01); B01F 2035/99 (2022.01); B01F 2101/58 (2022.01);
Abstract

A mixing apparatus includes a phosphoric acid aqueous solution supply, an additive supply, a tank, a phosphoric acid aqueous solution supply path and an additive supply path. The phosphoric acid aqueous solution supply is configured to supply a phosphoric acid aqueous solution. The additive supply is configured to supply an additive configured to suppress precipitation of a silicon oxide. The phosphoric acid aqueous solution supply path is configured to connect the phosphoric acid aqueous solution supply with the tank. The additive supply path is configured to connect the additive supply with the tank. The additive is supplied while fluidity is imparted to the phosphoric acid aqueous solution supplied from the phosphoric acid aqueous solution supply into the tank.

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