Company Filing History:
Years Active: 2020-2025
Title: The Innovations of Kouichiro Kouge
Introduction
Kouichiro Kouge is a prominent inventor based in Oyama, Japan. He has made significant contributions to the field of extreme ultraviolet (EUV) light generation. With a total of 3 patents, Kouge's work is pivotal in advancing technologies related to electronic device manufacturing.
Latest Patents
Kouge's latest patents include an extreme ultraviolet light generation method, an extreme ultraviolet light generation apparatus, and an electronic device manufacturing method. The extreme ultraviolet light generation method involves a target supply step that outputs a droplet target into a chamber. It also includes a prepulse laser light irradiation step that irradiates the droplet target with prepulse laser light to generate a diffusion target. The main pulse laser light irradiation step then irradiates the diffusion target with main pulse laser light to generate extreme ultraviolet light. This method utilizes two types of main pulse laser light, each with varying energy densities at different portions of the target.
The EUV chamber apparatus patent describes a chamber that includes a target generation unit configured to output a target toward a predetermined region inside the chamber. It also features a gas nozzle for supplying gas into the chamber and a shroud that surrounds part of the target's trajectory, incorporating a cooling medium for efficient operation.
Career Highlights
Kouge is currently employed at Gigaphoton Inc., where he continues to innovate in the field of EUV technology. His work is essential for the development of advanced manufacturing processes in the semiconductor industry.
Collaborations
Kouge collaborates with notable colleagues such as Yoshiyuki Honda and Hirokazu Hosoda, contributing to a dynamic research environment that fosters innovation.
Conclusion
Kouichiro Kouge's contributions to extreme ultraviolet light generation and electronic device manufacturing highlight his importance as an inventor in the technology sector. His patents reflect a commitment to advancing the capabilities of modern manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.