Location History:
- Tokyo, JP (1997)
- Himeji, JP (1998)
Company Filing History:
Years Active: 1997-1998
Title: **Kotaro Mino: Innovator in Ceramic Technologies**
Introduction
Kotaro Mino is a notable inventor based in Tokyo, Japan, recognized for his contributions to the field of advanced ceramics. With a focus on enhancing the functionality of electrostatic chucks used in semiconductor manufacturing, he holds two significant patents that showcase his innovative approach to materials and processes.
Latest Patents
Kotaro Mino's latest inventions include two key patents:
1. **Ceramic Electrostatic Chuck and Method** - This innovation pertains to an electrostatic chuck designed for clamping working members, such as semiconductor wafers. The chuck comprises at least one conductive electrode and an insulating layer made from a composition consisting of pyrolytic boron nitride (PBN) and a specific amount of carbon. This design optimizes the electrical resistivity to be below 10^14 Ω-cm, ensuring efficient clamping of the working member through an electrostatic field generated by a voltage source.
2. **Method of Manufacturing a Pyrolytic Boron Nitride Compact** - This patent details a process for producing a pyrolytic boron nitride compact with the same low electrical resistivity. The method involves using a feed gas of boron halide and ammonia while incorporating a hydrocarbon gas during the heating process. This careful control of the gas ratios and temperatures between 1600°C to 2200°C allows for the creation of a high-quality pyrolytic boron nitride that meets industry standards.
Career Highlights
Kotaro Mino is currently employed at Advanced Ceramics Corporation, where he applies his expertise in materials science to lead innovative projects and develop cutting-edge technology in semiconductor manufacturing. His work has significantly impacted the industry and has positioned him as a key player in the field of ceramic materials.
Collaborations
Mino collaborates with esteemed colleagues, including Junich Honma and Hisayuki Miyata, whose joint efforts further enhance the research and development capabilities at Advanced Ceramics Corporation. Their combined expertise has led to advancements in the functionality and application of ceramic technologies.
Conclusion
Kotaro Mino stands out as a pioneering inventor whose work continues to influence the evolution of semiconductor processing technologies. His patents reflect a commitment to innovation and excellence in the materials field, solidifying his role as an influential figure in the realm of advanced ceramics.