The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 1997
Filed:
Oct. 02, 1996
Junichi Honma, Tokyo, JP;
Kotaro Mino, Tokyo, JP;
Advanced Ceramics Corporation, Lakewood, OH (US);
Abstract
In accordance with the present invention a pyrolytic boron nitride compact having an electrical resistivity smaller than about 10.sup.14 .OMEGA.-cm is formed by the process of introducing a feed gas of gaseous boron halide and ammonia at a suitable ratio into a furnace heated to a temperature between 1600.degree. C. to 2200.degree. C. with the furnace containing a substrate of graphite to form a deposit of pyrolytic boron nitride upon said substrate, substantially simultaneously introducing a hydrocarbon gas into the furnace to form a codeposit of carbon in the crystal structure of the pyrolytic boron nitride deposit, controlling the mole fraction of said hydrocarbon gas to limit the concentration of carbon to less than about 3 wt % of the pyrolytic boron nitride composition.