Company Filing History:
Years Active: 2021-2023
Title: Koji Ushimaru: Innovator in Substrate Processing Technology
Introduction
Koji Ushimaru is a notable inventor based in Koshi, Japan, known for his contributions to the field of substrate processing. With a total of two patents to his name, Ushimaru has made significant strides in developing advanced technologies that improve substrate handling and processing methods.
Latest Patents
Ushimaru's recent innovations include two patents focused on substrate processing apparatuses and methods. The first patent outlines a substrate processing apparatus, which comprises a heat processing unit designed to perform a heat process on a substrate equipped with a film. This sophisticated apparatus features a heater to support and heat the substrate, a chamber to cover the substrate, and a gas ejector that directs gas toward the substrate’s surface. Moreover, it employs both outer peripheral and central exhausters to ensure efficient evacuation of the processing space.
The second patent presents a substrate placing apparatus and method, where a substrate can be horizontally placed on a table with multiple protrusions. The design includes a suction mechanism that attracts the substrate while minimizing flexure. This results in a more precise placement of the substrate, significantly mitigating any deformation usually caused by strong attraction.
Career Highlights
Koji Ushimaru contributes his expertise at Tokyo Electron Limited, a leading company in the semiconductor and flat-panel display manufacturing equipment industry. His role in developing innovative solutions has propelled advancements in substrate processing technologies, making him a key figure in his field.
Collaborations
Throughout his career, Ushimaru has collaborated with esteemed colleagues such as Masashi Itonaga and Yukinobu Otsuka. Together, they have worked on various projects aimed at enhancing substrate processing systems and technologies.
Conclusion
Koji Ushimaru's work serves as a testament to the innovative spirit driving the semiconductor industry forward. Through his patents and collaborative efforts, Ushimaru continues to influence the evolution of substrate processing technologies, paving the way for future advancements in this critical field.