Location History:
- Kodaira, JP (2004)
- Higashiyamato, JP (2004)
- Tokyo, JP (2007)
Company Filing History:
Years Active: 2004-2007
Title: Koji Homma: Innovator in Wafer Processing Technology
Introduction
Koji Homma is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, particularly in wafer processing. With a total of 3 patents to his name, his work has had a substantial impact on the industry.
Latest Patents
One of his latest patents is a wafer supporter, which includes a base made of nickel material and a thermally conductive member shaped like a lamina. This innovative design incorporates silicone rubber as the main material, blended with high-density Ag fine powder. The wafer supporting unit effectively prevents curvature in a wafer and ensures efficient cooling during processing, thereby avoiding heat degradation in the thermally conductive member.
Another notable patent is for a device and method for processing substrates. This apparatus features a processing container with a first and second processing gas supply unit positioned on either side of the substrate. The design allows for the first processing gas to be adsorbed by the substrate's surface, followed by the second processing gas, which reacts with the first to form a high dielectric film of a single-molecule layer.
Career Highlights
Koji Homma is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at this organization has allowed him to further develop his innovative ideas and contribute to advancements in wafer processing technology.
Collaborations
Throughout his career, Koji has collaborated with notable colleagues such as Mitsuhiro Yuasa and Hiroshi Shinriki. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies in the field.
Conclusion
Koji Homma's contributions to wafer processing technology exemplify his innovative spirit and dedication to advancing the semiconductor industry. His patents reflect a commitment to improving efficiency and performance in wafer processing, making him a key figure in this field.