Company Filing History:
Years Active: 2011-2013
Title: Koichi Sada: Innovator in Substrate Processing Technology
Introduction
Koichi Sada is a notable inventor based in Toyama, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 2 patents. His work primarily focuses on improving the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Koichi Sada's latest patents include a substrate processing apparatus designed to enhance the processing of substrates. This apparatus features a process chamber that accommodates a substrate, a gas supply line for delivering gas into the chamber, and an exhaust line for removing gas from the chamber. The gas supply line incorporates a preheating unit that warms the gas before it enters the process chamber. Additionally, the apparatus includes a metal pipeline with an angled section that connects the preheating unit to the chamber, along with a heat dissipation member to manage heat in the angled section.
Another significant patent is a substrate processing apparatus and method for manufacturing semiconductor devices. This invention consists of an outer tube, a manifold made of a non-metal material, and an inner tube for substrate processing. It also includes a heating device to warm the outer tube's interior and a lid with a seal member for closing the manifold's opening. A heat absorption member, also made of a non-metal material, is installed in the manifold to absorb heat from the heating device.
Career Highlights
Koichi Sada is currently employed at Hitachi Kokusai Electric Inc., where he continues to innovate in the field of semiconductor technology. His work has been instrumental in advancing substrate processing techniques, which are crucial for the production of high-quality semiconductor devices.
Collaborations
Throughout his career, Koichi has collaborated with talented individuals such as Takayuki Nakada and Tomoyuki Matsuda. These collaborations have contributed to the development of innovative technologies in the semiconductor industry.
Conclusion
Koichi Sada is a prominent inventor whose work in substrate processing technology has led to significant advancements in semiconductor manufacturing. His patents reflect his commitment to innovation and excellence in the field.