The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2011
Filed:
Aug. 26, 2009
Shinya Morita, Toyama, JP;
Koichi Sada, Toyama, JP;
Takayuki Nakada, Toyama, JP;
Tomoyuki Matsuda, Toyama, JP;
Shinya Morita, Toyama, JP;
Koichi Sada, Toyama, JP;
Takayuki Nakada, Toyama, JP;
Tomoyuki Matsuda, Toyama, JP;
Hitachi Kokusai Electric, Inc., Tokyo, JP;
Abstract
A substrate processing apparatus comprises: an outer tube; a manifold connected to the outer tube and made of a non-metal material; an inner tube disposed in the manifold at a more inner side than the outer tube and configured to process a substrate therein; a heating device installed at a more outer side than the outer tube and configured to heat the inside of the outer tube; a lid configured to open and close an opening of the manifold, with a seal member intervened therebetween; and a heat absorption member installed in the manifold, with a bottom end of the inner tube intervened therebetween, and configured to absorb heat from the heating device, the heat absorption member being made of a non-metal material.