Kohji Uda

Title: Kohji Uda: Innovator in Semiconductor Manufacturing

Introduction

Kohji Uda is a prominent inventor based in Yokohama, Japan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patents. Uda's work focuses on advanced alignment and exposure apparatuses that enhance the precision of semiconductor device production.

Latest Patents

Kohji Uda holds 2 patents that showcase his expertise in the field. His latest patents include the "Alignment apparatus" and the "SOR X-ray exposure apparatus having same." The alignment apparatus is designed to facilitate the precise alignment of masks and wafers during the semiconductor manufacturing process. The SOR X-ray exposure apparatus utilizes synchrotron radiation to transfer semiconductor device patterns onto resist on the semiconductor wafer, ensuring high integration levels in semiconductor devices.

Career Highlights

Uda is currently employed at Canon Kabushiki Kaisha, where he continues to develop cutting-edge technologies in semiconductor manufacturing. His work has been instrumental in advancing the capabilities of exposure units and alignment systems, which are critical for producing high-quality semiconductor devices.

Collaborations

Throughout his career, Kohji Uda has collaborated with notable colleagues, including Shunichi Uzawa and Takao Kariya. These collaborations have contributed to the development of innovative solutions in the semiconductor industry.

Conclusion

Kohji Uda's contributions to semiconductor manufacturing through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence the advancement of technology in semiconductor production.