Company Filing History:
Years Active: 2014-2024
Title: Koei Aida: Innovator in Gas Supply Technology
Introduction
Koei Aida is a notable inventor based in Hachioji, Japan. He has made significant contributions to the field of gas supply technology, holding a total of 3 patents. His work focuses on enhancing the efficiency and functionality of gas supply units and substrate processing apparatuses.
Latest Patents
Aida's latest patents include a gas supply unit and a substrate processing apparatus that incorporates this gas supply unit. The gas supply unit features an upper plate equipped with multiple injection holes, designed to optimize gas flow. One of the injection holes serves as a center injection hole, while the others are arranged concentrically around it as outer injection holes. The divider plate of the unit is designed with a center through hole that fluidly communicates with the center injection hole, along with protrusions that create distinct zones for each outer injection hole.
Career Highlights
Throughout his career, Koei Aida has worked with prominent companies such as ASM IP Holding B.V. and ASM Japan K.K. His experience in these organizations has allowed him to refine his expertise in gas supply technologies and contribute to innovative solutions in the industry.
Collaborations
Aida has collaborated with various professionals in his field, including his coworker Tomoyuki Baba. These collaborations have fostered an environment of innovation and have led to the development of advanced technologies.
Conclusion
Koei Aida's contributions to gas supply technology through his patents and collaborations highlight his role as a significant inventor in the industry. His work continues to influence advancements in substrate processing and gas supply systems.