This inventor holds 2 USPTO granted patents. Top assignee: Wacker Siltronic Gesellschaft Fur Halbleitermaterialien Ag. Active years: 1999-2000.
Company Filing History:
Years Active: 1999-2000
Title: Klaus Rottger: Innovator in Semiconductor Wafer Polishing
Introduction
Klaus Rottger is a notable inventor based in Schnaitsee, Germany. He has made significant contributions to the field of semiconductor technology, particularly in the polishing of semiconductor wafers. With a total of 2 patents to his name, Rottger's work has advanced the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Rottger's latest patents include a "Process and device for polishing semiconductor wafers" and a "Method and device for polishing semiconductor wafers." The first patent describes a process where at least one side of a semiconductor wafer is pressed against a polishing plate, with a polishing cloth stretched over it. The semiconductor wafer and the polishing plate are moved relative to each other to achieve the desired polish. This method involves passing the wafer over regions of the polishing plate that have defined radial widths and varying temperatures, controlled by temperature-control means integrated into the polishing plate.
The second patent outlines a method for polishing semiconductor wafers mounted on a support plate. The method includes applying specific pressure to pressure chambers before polishing and transmitting this pressure to the rear side of the support plate during the polishing process. This innovative approach enhances the precision and quality of the polishing operation.
Career Highlights
Klaus Rottger is associated with Wacker Siltronic Gesellschaft für Halbleitermaterialien AG, a leading company in the semiconductor industry. His work at Wacker Siltronic has positioned him as a key player in the development of advanced semiconductor materials and processes.
Collaborations
Rottger has collaborated with notable colleagues such as Heinrich Hennhofer and Manfred Thurner. These collaborations have contributed to the successful development and implementation of innovative technologies in the semiconductor sector.
Conclusion
Klaus Rottger's contributions to semiconductor wafer polishing demonstrate his commitment to innovation in technology. His patents reflect a deep understanding of the complexities involved in semiconductor manufacturing, making him a valuable asset to the industry.