This inventor holds 1 USPTO granted patent. Top assignee: Evatec Ag. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Klaus Mündle: Inventor in Substrate Support Technology.
Introduction
Klaus Mündle is an inventor based in Feldkirch, Austria. His patent work includes technology for supporting and rotating substrates during layer deposition.
Latest Patents
Mündle is associated with 1 patent: “Substrate Support Unit, and Apparatus and Method for Depositing a Layer Using the Same.” The invention describes a rotatable turntable carrying multiple substrate carrier units arranged concentrically around its axis. Each carrier can rotate around its own axis, which is parallel to the turntable’s axis. The design provides coordinated rotation for substrates during layer deposition.
Career Highlights
Mündle works at Evatec AG, a company associated with thin-film deposition and related technologies. His patent reflects work on equipment and methods for processing substrates.
Collaborations
Mündle’s listed coworkers include Florian Hagmann and Andreas Mark.
Conclusion
Klaus Mündle’s patent focuses on a substrate support system that combines turntable rotation with independently driven substrate carriers, contributing to equipment for layer deposition.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile