The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2026
Filed:
Sep. 08, 2020
Applicant:
Evatec Ag, Trübbach, CH;
Inventors:
Assignee:
EVATEC AG, Trübbach, CH;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10P 72/76 (2026.01); C23C 14/50 (2006.01); C23C 16/458 (2006.01); H10P 72/50 (2026.01);
U.S. Cl.
CPC ...
H10P 72/7618 (2026.01); C23C 14/505 (2013.01); C23C 16/4581 (2013.01); H10P 72/50 (2026.01); H10P 72/7612 (2026.01); H10P 72/7621 (2026.01);
Abstract
A substrate support unit including a turntable which is rotatable around a first axis and which is driven by a first drive. A plurality of substrate carrier units are arranged concentric to the first axis on the turntable. Each of the plurality of substrate carrier units includes a substrate carrier which is rotatable around a corresponding second axis and which is driven by a second drive, wherein all second axes are parallel to the first axis.