Location History:
- Kagoshima, JP (1987)
- Hayato, JP (1988 - 1990)
- Kokubu, JP (1986 - 2008)
- Kirishima, JP (2009 - 2010)
Company Filing History:
Years Active: 1986-2010
Title: Kiyoshi Yokoyama: Innovator in Semiconductor Technology
Introduction
Kiyoshi Yokoyama is a prominent inventor based in Kirishima, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 11 patents. His work focuses on enhancing the efficiency and effectiveness of wafer processing and handling.
Latest Patents
Yokoyama's latest patents include innovative technologies such as a bonded body, a wafer support member using the same, and a wafer treatment method. The bonded body consists of a ceramic member and a metal composite member, featuring a bonding layer that is less likely to be eroded by plasma. This design includes a ceramic member with two opposing main surfaces, one of which has a first metal layer, and a metal composite member with a second metal layer. The brazing material layer that joins these two layers has a unique outer circumferential surface with a depression formed at the middle position in the thickness direction.
Another notable invention is the electrostatic chuck, which boasts a good soaking feature and allows a wafer to reach a saturation temperature quickly. This chuck has a platy body with a mounting surface for the wafer and an attracting electrode on the opposite surface. It includes gas introducing through holes and a gas flow path formed by a series of protrusions on the mounting surface, designed to enhance the chuck's performance.
Career Highlights
Kiyoshi Yokoyama is currently employed at Kyocera Corporation, where he continues to innovate and develop new technologies in semiconductor processing. His work has significantly impacted the industry, leading to advancements that improve the efficiency of wafer handling and treatment.
Collaborations
Yokoyama collaborates with fellow inventor Makoto Yoshida, contributing to the development of cutting-edge technologies in their field.
Conclusion
Kiyoshi Yokoyama's contributions to semiconductor technology through his innovative patents and work at Kyocera Corporation highlight his role as a leading inventor in the industry. His advancements continue to shape the future of wafer processing and handling.