Company Filing History:
Years Active: 1997-2002
Title: Kiyoshi Maeda: Innovator in Semiconductor Technology
Introduction
Kiyoshi Maeda is a prominent inventor based in Hyogo, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His innovative approaches have paved the way for advancements in manufacturing processes within the industry.
Latest Patents
Maeda's latest patents include a method of manufacturing semiconductor devices that introduces an improved etching technique. This method allows for the formation of a silicon nitride film with an adequate film thickness at the sidewall portion of a pattern. The process involves dry-etching a silicon nitride film that covers a stepped pattern, utilizing plasma of mixed gases containing CH₄ and O₂. As a result, a sidewall spacer of the silicon nitride film is formed at the sidewall of the pattern in a self-aligned manner. Another notable patent is a method of fabricating a semiconductor device, which involves forming a hard mask insulating layer on a gate electrode situated on a silicon substrate. This method includes the formation of an SiN sidewall spacer directly on a thin SiO₂ layer that covers the side surface of the gate electrode.
Career Highlights
Throughout his career, Kiyoshi Maeda has worked with notable companies, including Mitsubishi Electric Corporation. His work has significantly impacted the semiconductor industry, showcasing his expertise and innovative spirit.
Collaborations
Maeda has collaborated with esteemed colleagues such as Hiroshi Matsuo and Yuichi Yokoyama. Their combined efforts have contributed to the advancement of semiconductor technologies.
Conclusion
Kiyoshi Maeda's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the field. His innovative methods continue to shape the future of semiconductor manufacturing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.