This inventor holds 4 USPTO granted patents. Top assignee: Analog Devices,inc.. Active years: 2001-2005.
Company Filing History:
Years Active: 2001-2005
Title: Kieran Nunan: Innovator in MEMS Technology
Introduction
Kieran Nunan is a notable inventor based in Carlisle, MA (US). He has made significant contributions to the field of microelectromechanical systems (MEMS) technology. With a total of 4 patents to his name, Nunan has demonstrated his expertise and innovative spirit in the industry.
Latest Patents
One of Kieran Nunan's latest patents is titled "TiW platinum interconnect and method of making the same." This patent describes a metallization stack designed for use as a contact structure in integrated MEMS devices. The metallization stack consists of a titanium-tungsten adhesion and barrier layer, topped with a platinum layer. The platinum feature is created through a process of sputter etching in argon, followed by a wet etch in aqua regia using an oxide hardmask. Alternatively, the titanium-tungsten and platinum layers can be deposited sequentially and patterned using a single plasma etch process with a photoresist mask.
Career Highlights
Kieran Nunan is currently employed at Analog Devices, Inc., where he continues to push the boundaries of innovation in MEMS technology. His work has been instrumental in advancing the capabilities of integrated devices, making them more efficient and reliable.
Collaborations
Throughout his career, Nunan has collaborated with talented individuals such as Susan A. Alie and Scott Limb. These partnerships have fostered a creative environment that encourages the development of groundbreaking technologies.
Conclusion
Kieran Nunan's contributions to MEMS technology through his patents and collaborations highlight his role as an influential inventor in the field. His innovative work continues to shape the future of integrated devices.