Kevin Su

Title: Kevin Su: Innovator in Chemical-Mechanical Polishing Processes

Introduction

Kevin Su is a prominent inventor based in Jubei, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of chemical-mechanical polishing (CMP) processes. With a total of 2 patents, his work has advanced the techniques used in shallow trench isolation.

Latest Patents

Kevin Su's latest patents focus on innovative methods for forming shallow trench isolation. One of his notable patents describes a process that includes etching trenches through a nitride layer, a polysilicon layer, and a pad oxide layer into a semiconductor substrate. The trenches are subsequently filled with an oxide layer. A silicon oxynitride layer is deposited over the oxide layer, and both layers are polished away using a first slurry with high selectivity. A second polishing step utilizes a second slurry with low selectivity to remove the oxide layer. Finally, the nitride layer is removed, and a third polishing is performed to planarize the oxide layer using a third slurry with high selectivity. Another patent outlines a similar CMP process, emphasizing the importance of selectivity in the polishing steps to achieve optimal results.

Career Highlights

Kevin Su is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His expertise in CMP processes has positioned him as a valuable asset to the company, contributing to advancements in semiconductor fabrication techniques.

Collaborations

Kevin has collaborated with various professionals in his field, including his coworker Juing-Yi Cheng. Their combined efforts have led to innovative solutions in semiconductor manufacturing.

Conclusion

Kevin Su's contributions to the field of chemical-mechanical polishing have significantly impacted semiconductor manufacturing processes. His innovative patents and career at Taiwan Semiconductor Manufacturing Company Limited highlight his role as a key inventor in this critical industry.