Ker-Hsun Liao

Title: Innovations by Ker-Hsun Liao: Pioneering Semiconductor Advancements

Introduction

Ker-Hsun Liao is a notable inventor based in Hsinchu, Taiwan, recognized for his significant contributions to semiconductor technology. With a total of five patents to his name, Liao is a part of the dynamic team at Taiwan Semiconductor Manufacturing Company Ltd. His innovative work centers around improving the effectiveness and efficiency of semiconductor processing.

Latest Patents

Among his latest patents, one focuses on a semiconductor processing tool and methods of operation. This patent presents techniques and apparatuses designed to evaluate the performance of a dry-clean operation within a deposition tool. The invention includes a cleaning-control subsystem equipped with a gas concentration sensor and a temperature sensor, strategically mounted within the deposition tool’s exhaust system. These sensors monitor the cleaning process by providing vital data, such as the concentration of chemical compounds produced as bi-products and temperature data related to exothermic reactions. This information is essential for assessing the efficiency and effectiveness of the dry-clean operations.

Another noteworthy patent authored by Liao pertains to reducing vibration in semiconductor manufacturing apparatuses. This method entails measuring vibration levels and identifying sections of the manufacturing equipment that exceed predetermined vibration thresholds. By attaching weights to the apparatus's external surface in those sections, vibration levels can be significantly reduced to ensure optimal performance.

Career Highlights

Throughout his career, Ker-Hsun Liao has established himself as a valuable member of the semiconductor innovation community. Not only has he been recognized for his inventive skills, but his dedication to advancing technology within Taiwan Semiconductor Manufacturing Company Ltd. has also been noteworthy.

Collaborations

Liao has had the opportunity to collaborate with fellow inventors Yi Chen Ho and Chih Ping Liao. Their teamwork has contributed to the development of key semiconductor technologies that support their company’s leadership in the industry.

Conclusion

Ker-Hsun Liao's innovative patents and collaborative efforts represent significant strides in semiconductor manufacturing technology. His work at Taiwan Semiconductor Manufacturing Company Ltd. continues to impact the industry, enhancing operational efficiency and effectiveness in semiconductor production. As technology advances, contributions by inventors like Liao will undoubtedly play a crucial role in shaping the future of semiconductor innovations.