Company Filing History:
Years Active: 2014
Title: Kentaro Sera: Innovator in Film Deposition Technology
Introduction
Kentaro Sera is a notable inventor based in Yamanashi, Japan. He has made significant contributions to the field of film deposition methods, which are crucial in various technological applications. His innovative approach has led to the development of a unique patent that enhances the efficiency of thin film production.
Latest Patents
Kentaro Sera holds a patent for a film deposition method. This method involves alternately repeating an adsorption step and a reaction step with an interval period in between. The adsorption step includes opening a first on-off valve of a source gas supplying system for a predetermined time period to supply a source gas to a process chamber. After the time period elapses, the first valve is closed, confining the source gas within the process tube, allowing it to be adsorbed on the object to be processed while a third on-off valve of a vacuum evacuation system remains closed. The reaction step involves opening a second on-off valve of a reaction gas supplying system to allow the source gas and the reaction gas to react, producing a thin film on the object being processed.
Career Highlights
Kentaro Sera is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at this esteemed organization has allowed him to further his research and development in film deposition technologies. His innovative contributions have positioned him as a key figure in advancing manufacturing processes.
Collaborations
Kentaro has collaborated with notable colleagues such as Toshiyuki Ikeuchi and Pao-Hwa Chou. These collaborations have fostered a productive environment for innovation and have contributed to the success of their projects.
Conclusion
Kentaro Sera's contributions to film deposition technology exemplify the spirit of innovation in the field. His patent and work at Tokyo Electron Limited highlight his commitment to advancing technology and improving manufacturing processes. His achievements serve as an inspiration for future inventors in the industry.