Kent Douglas

Title: Innovator Kent Douglas: Advancements in Substrate Support Technology

Introduction

Kent Douglas, a distinguished inventor based in San Martin, CA, has made significant contributions to the field of substrate support technology. With three patents to his name, Douglas combines innovative design with practical applications, particularly in dynamic motion compensation systems. His work has particularly benefited industries that require precision in the positioning of substrates during various processes.

Latest Patents

Among his latest inventions, Douglas has developed a Z-stage with a dynamically driven stage mirror and a chuck assembly. This substrate support apparatus is characterized by methods that allow for the dynamic compensation of a substrate chuck's motion relative to a stage mirror. By sensing the displacement of the substrate chuck, the invention effectively utilizes feedback loops with Z-stage actuators and/or XY-stage actuators to achieve accuracy. Furthermore, the design incorporates a Z stage plate, a stage mirror, and various actuators that grant the substrate chuck six degrees of freedom, enhancing operational capabilities. The actuators in this innovative assembly may include force flexures, strategically designed to impart movement in a Z direction while maintaining stability in various applications.

Career Highlights

Kent Douglas has held pivotal roles in prominent companies such as KLA-Tencor Corporation, where he has applied his expertise to develop cutting-edge technologies. His professional journey has greatly impacted the field of semiconductor manufacturing and substrate handling, contributing to advancements that enhance production efficiency and product quality.

Collaborations

Throughout his career, Douglas has collaborated with notable individuals in the innovation space, including colleagues like Salam Harb and James Allen Haslim. These partnerships have facilitated the exchange of ideas and expertise, further enriching the innovations he has brought to fruition.

Conclusion

Kent Douglas stands as a testament to the power of innovation in technology, particularly with his work on dynamically driven substrate support systems. As industries continue to evolve, the implications of his patents will likely play an essential role in shaping future technologies and enhancing precision in various applications. His commitment to advancing substrate technology not only reflects his individual ingenuity but also serves as an inspiration for current and future inventors.