Location History:
- Manchester, MA (US) (2008)
- Beverly, MA (US) (2010 - 2023)
Company Filing History:
Years Active: 2008-2023
Title: Kenneth P Regan: Innovator and Inventor in Gas Cluster Ion Beam Systems
Introduction:
Kenneth P Regan is a talented innovator and inventor hailing from Manchester, MA (US). With a remarkable career that spans several notable companies and eight patents, Regan has made significant contributions in the field of gas cluster ion beam systems. His dedication to advancing technology and improving processes has placed him at the forefront of innovation.
Latest Patents:
One of Regan's recent patents is titled "Tuning Gas Cluster Ion Beam Systems." This patent introduces a novel method for processing substrates using gas cluster ion beams. The process involves ionizing a gas cluster beam, measuring the beam current synchronously with a drive pulse train, obtaining time-of-flight information, determining size information based on this data, adjusting a process parameter, and then exposing the substrate to the gas cluster beam with the adjusted parameter. This patent demonstrates Regan's expertise in optimizing gas cluster ion beam systems for efficient substrate processing.
Another noteworthy patent by Regan is for "Compensated Location Specific Processing Apparatus and Method." This invention pertains to an apparatus and method for treating workpieces using a particle beam. The system includes a scanner, a scanner control circuit for managing scan properties, and a beam control circuit for controlling beam flux according to a duty cycle during processing. Regan's invention ensures precision and control in processing workpieces with a particle beam.
Career Highlights:
Kenneth P Regan has garnered extensive experience throughout his career, working with top companies in the industry. He has made significant contributions to innovations in gas cluster ion beam systems, leading to advancements in substrate processing techniques.
Regan has worked with Tel Epion Corporation, which focuses on advanced semiconductor manufacturing technologies. His expertise and contributions to the company have undoubtedly shaped the field of gas cluster ion beam systems.
Additionally, Regan has been associated with Tel Manufacturing and Engineering of America, Inc. During his tenure, he has continued to develop cutting-edge solutions and refine processes related to gas cluster ion beam systems. His collaborations with esteemed colleagues have undoubtedly contributed to the success of these companies.
Collaborations:
Kenneth P Regan has had the pleasure of collaborating with talented individuals in his field. Among his notable coworkers are Matthew C Gwinn and Martin D Tabat. Their combined expertise likely contributed to the successful implementation and advancement of gas cluster ion beam systems, ultimately resulting in the patents assigned to Regan.
Conclusion:
Kenneth P Regan's contributions to the field of gas cluster ion beam systems have been invaluable. With his expertise and innovative mindset, Regan has introduced novel methods and improved existing processes. His patents in tuning gas cluster ion beam systems and compensated location-specific processing methods highlight his commitment to driving technological progress. As an esteemed inventor and innovator, Regan's work continues to impact the industry positively.