Kenneth P MacWilliams

Title: Innovations of Kenneth P MacWilliams

Introduction

Kenneth P MacWilliams is a notable inventor based in Monte Sereno, California. He holds a total of six patents, showcasing his contributions to the field of technology and engineering. His work primarily focuses on methods for creating advanced dielectric structures, which are essential in various electronic applications.

Latest Patents

One of Kenneth's latest patents involves methods for making dual-damascene dielectric structures. This patent describes a dielectric structure and a method for creating a dielectric structure for dual-damascene applications over a substrate. The method includes forming a barrier layer over the substrate, followed by an inorganic dielectric layer and a low dielectric constant layer. A trench is formed in the low dielectric constant layer using a first etch chemistry, which is timed to etch through a partial thickness of the layer. The second etch chemistry is then used to form a via hole in the inorganic dielectric layer, ensuring that the via is within the trench. Specific examples of materials used include un-doped TEOS oxide or fluorine-doped oxide for the inorganic dielectric layer, and carbon-doped oxide or other low K dielectrics for the low dielectric constant layer.

Career Highlights

Throughout his career, Kenneth has made significant contributions to the field of semiconductor manufacturing. He has worked with Lam Research Corporation, where he applied his expertise in developing innovative solutions for the industry. His patents reflect his commitment to advancing technology and improving manufacturing processes.

Collaborations

Kenneth has collaborated with notable professionals in his field, including Jay E Uglow and Nicolas J Bright. These collaborations have further enriched his work and contributed to the development of cutting-edge technologies.

Conclusion

Kenneth P MacWilliams is a distinguished inventor whose work in dielectric structures has made a significant impact on the technology sector. His innovative methods and collaborations highlight his dedication to advancing the field of semiconductor manufacturing.