Location History:
- Koshi-Machi, JP (2006)
- Kumamoto, JP (2013)
- Koshi, JP (2012 - 2022)
Company Filing History:
Years Active: 2006-2022
Title: Kenichi Shigetomi: Innovator in Substrate Processing Technology
Introduction
Kenichi Shigetomi is a prominent inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing, holding a total of seven patents. His work focuses on enhancing the efficiency and uniformity of heating processes in semiconductor manufacturing.
Latest Patents
Shigetomi's latest patents include a substrate processing apparatus and a method for adjusting such apparatus. The substrate processing apparatus features multiple heating modules, each equipped with a table designed for heating substrates with various heated zones. Each table contains several heaters, which are independently controlled to ensure that the integrated heat quantities across the heated zones remain consistent. This innovation allows for precise temperature control during the heating process, which is crucial for achieving uniform results in semiconductor fabrication.
Another notable patent involves a heating apparatus that standardizes the time required for a wafer to reach a reference temperature. This technology ensures that temperature rise curves are uniform across different heating modules, leading to consistent heating treatment. As a result, the line width of patterns formed on the wafer becomes uniform, enhancing the overall quality of the semiconductor products.
Career Highlights
Kenichi Shigetomi is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has been instrumental in advancing the technology used in substrate processing, making significant impacts on production efficiency and product quality.
Collaborations
Shigetomi has collaborated with notable colleagues, including Takeshi Saikusa and Takayuki Fukudome. Their combined expertise has contributed to the development of innovative solutions in the field of semiconductor processing.
Conclusion
Kenichi Shigetomi's contributions to substrate processing technology have established him as a key figure in the semiconductor industry. His innovative patents and collaborative efforts continue to drive advancements in manufacturing processes, ensuring high-quality outcomes in semiconductor production.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.