Kengo Maehata is a prominent inventor based in Kitakyushu, Japan. He has made significant contributions to the field of electrostatic chuck technology, holding a total of 5 patents. His innovative designs have advanced the capabilities of devices used in various industrial applications.

Latest Patents

One of Maehata's latest patents involves an electrostatic chuck that features a ceramic dielectric substrate, a base plate, and a heater plate. The heater plate consists of first and second support plates made of metal, with a heater element positioned between them. This design includes a first resin layer between the first support plate and the heater element, and a second resin layer between the second support plate and the heater element. Notably, the first support plate has a surface that includes a first region overlapping the heater element and a second region that does not. In a cross-section parallel to the stacking direction, the second region protrudes toward the second support plate side compared to the first region.

Another patent by Maehata describes an electrostatic chuck that includes a ceramic dielectric substrate with a first major surface for placing an object to be processed and a second major surface on the opposite side. A base plate is provided on the side of the second major surface to support the ceramic dielectric substrate. This base plate features a first communicating passage that allows a medium to adjust the temperature of the object being processed. The design ensures that the ratio of variation of the maximum height in the upper surface to the height of the first communicating passage does not exceed 1%.

Career Highlights

Kengo Maehata has established himself as a key figure in the field of electrostatic chuck technology through his innovative designs and patents. His work has been instrumental in enhancing the performance and efficiency of devices used in various applications.

Collaborations

Maehata has collaborated with notable coworkers, including Hitoshi Sasaki and Yuichi Yoshii. Their combined expertise has contributed to the development of advanced technologies in their field.

Conclusion

Kengo Maehata's contributions to electrostatic chuck technology have made a significant impact in the industry. His innovative patents and collaborations highlight his dedication to advancing technology and improving industrial processes.

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