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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11152244 B1

PDFFull Text
Date of Patent:
Oct. 19, 2021

Filed:

Jan. 09, 2019

Electrostatic chuck

Applicant:

Toto Ltd., Kitakyushu, JP;

Inventors:

Kosuke Yamaguchi, Kitakyushu, JP;

Hitoshi Sasaki, Kitakyushu, JP;

Kengo Maehata, Kitakyushu, JP;

Shumpei Kondo, Kitakyushu, JP;

Yuichi Yoshii, Kitakyushu, JP;

Assignee:

Toto Ltd., Fukuoka, JP;

Attorneys:

Carrier Blackman & Associates, P.C.

Joseph P. Carrier

William D. Blackman

Primary Examiner:

Phuong T Nguyen

Int. Cl.
CPC ...
H01L 21/683 (2006.01); H02N 13/00 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); H05B 1/02 (2006.01); H05B 3/03 (2006.01); H05B 3/26 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H01L 21/68757 (2013.01); H01L 21/68785 (2013.01); H02N 13/00 (2013.01); H05B 1/0233 (2013.01); H05B 3/03 (2013.01); H05B 3/265 (2013.01); H05B 2203/002 (2013.01);
Abstract

An electrostatic chuck includes: a ceramic dielectric substrate; a base plate; and a heater plate. The heater plate includes a first and a second support plates including a metal, a heater element provided between the first and the second support plates, a first resin layer provided between the first support plate and the heater element, and a second resin layer provided between the second support plate and the heater element. A surface of the first support plate on the second support plate side includes a first region and a second region, the first region overlapping the heater element when viewed along the stacking direction, the second region not overlapping the heater element when viewed along the stacking direction. In a cross section parallel to the stacking direction, the second region protrudes toward the second support plate side compared to the first region.

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