Company Filing History:
Years Active: 1986-1988
Title: **Keizo Nomura: A Pioneer in Projection Aligner Technology**
Introduction
Keizo Nomura, an accomplished inventor based in Higashiyamato, Japan, has made significant contributions to the field of semiconductor processing technologies. With three patents to his name, Nomura has focused on developing innovative projection aligner methods that enhance the precision and efficiency of semiconductor manufacturing.
Latest Patents
Nomura's latest patents revolve around the projection aligner technology. One of his notable inventions is the "Projection aligner method utilizing monitoring of light quantity." This method involves a projection aligner where light from a source is directed through a mask to focus an image on a wafer. A key feature of this invention is the inclusion of at least one sensor positioned in the optical path between the light source and the mask. This setup allows for effective monitoring and control of luminosity and its distribution on the wafer, ensuring that they are maintained at optimal levels. This technology holds particular importance for minute processing applications in semiconductor device production.
Another significant patent by Nomura is the "Projection aligner with a sensor for monitoring light quantity," which shares similarities with his previous invention. It emphasizes the use of sensors to maintain proper luminosity and distribution of light on the wafer, further solidifying the efficacy of projection alignment methods in intricate semiconductor processing technologies.
Career Highlights
Throughout his impressive career, Keizo Nomura has worked with leading organizations, including Hitachi, Ltd. and Hitachi Ome Electronic Co., Ltd. His experience in these prestigious companies has played a crucial role in his development as an inventor and researcher, allowing him to contribute valuable innovations to the field.
Collaborations
Nomura has collaborated with notable colleagues, including Koyo Morita and Hiroshi Nishizuka. These partnerships have likely enriched his research and development efforts, enabling the creation of advanced technologies that benefit the semiconductor industry.
Conclusion
Keizo Nomura stands out as a key figure in the evolution of projection aligner technology. His innovative patents and collaborations with esteemed colleagues reflect his dedication to improving semiconductor manufacturing processes. As technology advances, Nomura's contributions will continue to play a vital role in shaping the future of the industry.