Location History:
- Cupertino, CA (US) (1999)
- Los Gatos, CA (US) (2003 - 2006)
Company Filing History:
Years Active: 1999-2006
Title: Innovations of Inventor Keith Harvey
Introduction
Keith Harvey is a notable inventor based in Los Gatos, California. He has made significant contributions to the field of technology, particularly in the area of semiconductor processing. With a total of 4 patents to his name, Harvey's work has had a substantial impact on the industry.
Latest Patents
One of his latest patents is titled "Backflush chamber clean." This invention describes a method for effectively cleaning a processing chamber using a remote plasma that flows in the opposite direction of the gas used during wafer processing. The remotely generated plasma is introduced into the chamber through a processing gas exhaust or other port, and it is then exhausted through the gas distribution shower head to the foreline. This reverse flow of remote cleaning plasma is maintained throughout the chamber cleaning step, ensuring thorough cleaning. In an alternative embodiment, the flow direction of the remote cleaning plasma can alternate between reverse and conventional forward flow.
Another significant patent is the "UV radiation source for densification of CVD carbon-doped silicon oxide films." This invention features a tunable UV radiation source that optimizes the densification process of carbon-doped silicon oxide films. The composition and concentration of stimulated gases within an airtight bulb are controlled to produce radiation that is optimized for absorption by undesirable chemical bonds in the film. This process leads to the disruption of these bonds and their replacement with more stable chemical bonds. The emitted radiation's energy and intensity are determined by the identity and concentration of the excited chemical species, allowing for precise control over the densification process.
Career Highlights
Keith Harvey is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work at Applied Materials has allowed him to develop innovative solutions that enhance semiconductor manufacturing processes.
Collaborations
Throughout his career, Harvey has collaborated with talented individuals such as Tian-Hoe Lim and Li-Qun Xia. These collaborations have contributed to the advancement of technology in the semiconductor field.
Conclusion
In summary, Keith Harvey is a distinguished inventor whose innovations have significantly influenced semiconductor processing. His patents reflect a commitment to improving technology and enhancing manufacturing efficiency.