The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 1999
Filed:
May. 14, 1997
Applicant:
Inventors:
Keith Harvey, Cupertino, CA (US);
Quoc Truong, San Jose, CA (US);
Irwin Silvestre, Santa Clara, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05D / ;
U.S. Cl.
CPC ...
137-9 ; 73 232 ; 42218614 ; 1374875 ;
Abstract
A system for controlling pressure flow and concentration Of O.sub.3 /O.sub.2 positions a thermal MFC upstream from an ozone generator to avoid the adverse effects of ozone on the thermal MFC. A flow restrictor diverts a precise amount of flow to an ozone monitor so that the flow to a CVD chamber is precisely controlled. In other embodiments a full-flow ozone monitor and non-thermal MFC are utilized.
Published as: