Company Filing History:
Years Active: 2003-2004
Title: Innovations of Keith G. Pierce in Semiconductor Polishing Technologies
Introduction
Keith G. Pierce is an accomplished inventor based in Colorado Springs, CO (US). He has made significant contributions to the field of semiconductor technology, particularly in the area of chemical mechanical planarization (CMP). With a total of 3 patents to his name, Pierce's work has advanced the methods used in polishing semiconductor structures.
Latest Patents
Among his latest patents, one notable invention is a composition and method for polishing in metal CMP. This invention provides a composition designed for polishing a composite semiconductor structure that includes a metal layer, a barrier layer, and an insulating layer. The composition consists of an aqueous medium, an oxidant, and an organic polymer that helps to control the removal of the oxide film.
Another significant patent focuses on methods to control film removal rates for improved polishing in metal CMP. This method involves a two-step polishing process for semiconductor structures that include a conductive metal interconnect layer. The first step effectively removes the conducting metal overburden while preserving the barrier or liner layer and the underlying dielectric structure. The second step is aimed at removing the barrier layer with minimal impact on the underlying dielectric layer. Five different methods and associated slurry compositions are described for this second polishing step, ensuring the integrity of the remaining semiconductor structure is maintained.
Career Highlights
Keith G. Pierce is currently employed at Rodel Holdings, Inc., where he continues to innovate in the field of semiconductor polishing technologies. His expertise and inventions have positioned him as a key figure in advancing the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Throughout his career, Pierce has collaborated with notable colleagues, including Vikas Sachan and Elizabeth A. (Kegerise) Langlois. These collaborations have further enriched his work and contributed to the development of innovative solutions in the semiconductor industry.
Conclusion
Keith G. Pierce's contributions to semiconductor polishing technologies through his patents and collaborations highlight his role as a leading inventor in this field. His work continues to influence the efficiency of semiconductor manufacturing processes, showcasing the importance of innovation in technology.