Kawasaki, Japan

Keiko Yano


Average Co-Inventor Count = 4.2

ph-index = 6

Forward Citations = 56(Granted Patents)


Company Filing History:


Years Active: 1992-2000

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9 patents (USPTO):Explore Patents

Title: Inventor Spotlight: Keiko Yano

Introduction

Keiko Yano is a prominent inventor based in Kawasaki, Japan, known for her significant contributions to the field of semiconductor device production. With a remarkable portfolio that includes nine patents, Yano has established herself as a pioneering figure in the development of innovative technologies.

Latest Patents

Yano's latest patents showcase her expertise in creating advanced resist developing apparatuses used in semiconductor production. One patent details a process where a pattern-wise exposed resist coating is developed using a developer made of one or more organic solvents. This unique method involves multiple stages, where development is paused after a significant permeation of the developer occurs on the surface of the resist pattern. The developed resist coating is meticulously dried between stages, ensuring high precision in the resultant patterns. Another of her remarkable patents involves forming electroconductive patterns by applying a specialized solution to substrates, resulting in a cured electroconductive film with exceptional electrical properties.

Career Highlights

Throughout her career, Keiko Yano has contributed her innovative prowess to esteemed companies, including Fujitsu Corporation and Nitto Chemical Industry Co., Ltd. Her technical knowledge and creative problem-solving skills have helped advance semiconductor technologies significantly.

Collaborations

Yano's journey has included collaboration with notable colleagues such as Takashi Maruyama and Keiji Watanabe. These partnerships have not only fostered the exchange of ideas but have also propelled forward the research and development of cutting-edge semiconductor processes.

Conclusion

In conclusion, Keiko Yano stands out as a leading inventor whose work has greatly impacted the semiconductor industry. With her innovative patents and collaborative efforts, she continues to pave the way for advancements in technology, making her an inspiring figure in the field of inventions.

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