The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 1998
Filed:
Jun. 06, 1995
Applicant:
Inventors:
Keiji Watanabe, Kawasaki, JP;
Yasuhiro Yoneda, Kawasaki, JP;
Takashi Maruyama, Kawasaki, JP;
Keiko Yano, Kawasaki, JP;
Tomio Nakamura, Yokohama, JP;
Shigeru Shimizu, Yokohama, JP;
Takashi Saitoh, Yokohama, JP;
Assignees:
Fujitsu Limited, Kawasaki, JP;
Nitto Chemical Industry Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C / ; B44C / ;
U.S. Cl.
CPC ...
430323 ; 430325 ; 430327 ; 430330 ; 430296 ; 4302731 ; 430942 ; 15665911 ; 15666111 ; 216 41 ; 216 49 ; 437 20 ; 437931 ;
Abstract
A composition for forming an electrically conductive layer which is used in patterning of a resist with electric charge beam, which comprises: