Company Filing History:
Years Active: 2024
Title: Keiji Tabuki: Innovator in Plasma Processing Technology
Introduction
Keiji Tabuki is a notable inventor based in Nirasaki, Japan. He has made significant contributions to the field of plasma processing technology. His innovative work has led to the development of a unique plasma processing apparatus that enhances the efficiency of substrate processing.
Latest Patents
Keiji Tabuki holds a patent for a plasma processing apparatus and method. This apparatus features a vertical tubular processing container designed to accommodate multiple substrates in various stages. It includes a plasma partition wall that defines a plasma generation space and a plasma electrode along the wall. Additionally, a processing gas supplier is positioned outside the plasma generation space to supply the necessary plasma generation gas.
Career Highlights
Keiji Tabuki is associated with Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has been instrumental in advancing plasma processing technologies, which are crucial for the production of semiconductor devices.
Collaborations
Throughout his career, Keiji has collaborated with talented individuals such as Yamato Tonegawa and Kazumasa Igarashi. These collaborations have fostered innovation and contributed to the success of various projects within the field.
Conclusion
Keiji Tabuki's contributions to plasma processing technology exemplify his dedication to innovation and excellence. His patent and work at Tokyo Electron Limited highlight his role as a key figure in advancing semiconductor manufacturing processes.