This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Ebara Corporation. Active years: 2025.
Company Filing History:
Years Active: 2025
Title: Keiichi Nojo: Innovator in Substrate Processing Technology
Introduction
Keiichi Nojo is a prominent inventor based in Tokyo, Japan. He is known for his contributions to the field of substrate processing technology. With a focus on improving cleaning capabilities, Nojo has developed innovative solutions that enhance the efficiency of substrate processing.
Latest Patents
Nojo holds a patent for a "Transfer apparatus, cleaning module, and substrate processing apparatus." This invention aims to achieve a cleaning module and a substrate processing apparatus that can improve the cleaning capability for a substrate with a simple structure. The cleaning module includes a first transfer mechanism, an ultrasonic cleaning tank, a transfer machine, and a second transfer mechanism. The first transfer mechanism is designed for transferring a substrate with a surface to be polished facing downward up to a substrate grip or release position along a transfer passage. The ultrasonic cleaning tank is positioned apart from the transfer passage and is utilized for cleaning the substrate. The transfer machine facilitates the movement of the substrate between the grip or release position and the ultrasonic cleaning tank. Finally, the second transfer mechanism transfers the substrate from the ultrasonic cleaning tank to further downstream along the transfer passage.
Career Highlights
Keiichi Nojo is currently employed at Ebara Corporation, a leading company in the field of environmental and industrial machinery. His work at Ebara has allowed him to focus on developing advanced technologies that address the needs of the substrate processing industry.
Collaborations
Throughout his career, Nojo has collaborated with talented individuals such as Asagi Matsugu and Akihiro Yazawa. These collaborations have contributed to the advancement of innovative technologies in substrate processing.
Conclusion
Keiichi Nojo is a significant figure in the realm of substrate processing technology. His innovative patent and contributions to Ebara Corporation highlight his commitment to improving cleaning capabilities in the industry. His work continues to influence advancements in substrate processing technology.