Kazuyuki Tomita

Title: Kazuyuki Tomita: Innovator in Dry Etching Technology

Introduction

Kazuyuki Tomita is a prominent inventor based in Osaka, Japan. He has made significant contributions to the field of dry etching technology, holding a total of 3 patents. His work has been instrumental in advancing the efficiency and effectiveness of dry etching processes used in various applications.

Latest Patents

Tomita's latest patents include a dry etching process utilizing a recessed electrode. This innovative dry etching apparatus features parallel electrodes that confront each other, with a high-frequency voltage applied between them. The electrode designed to hold the base material has a recess in its surface, and it is covered with an insulating layer to ensure that part of the structure does not come into contact with the base material. Another notable patent is the magnetron dry-etching apparatus, which includes a rotatable magnet assembly behind its anode electrode. This assembly comprises at least one pair of rotatable permanent magnets fixed on a common yoke, creating a uniform magnetic field on the wafer during etching, thus ensuring consistent results even with varying gas pressures and etching conditions.

Career Highlights

Kazuyuki Tomita is associated with Matsushita Electric Industrial Co., Ltd., a leading company in the electronics industry. His work at this organization has allowed him to develop and refine his innovative ideas in dry etching technology.

Collaborations

Throughout his career, Tomita has collaborated with notable colleagues, including Masuo Tanno and Tadashi Kimura. These partnerships have contributed to the advancement of their shared goals in the field of technology.

Conclusion

Kazuyuki Tomita's contributions to dry etching technology have established him as a key figure in the industry. His innovative patents and collaborations reflect his commitment to advancing technological processes.