Kazuyuki Iori

Title: Kazuyuki Iori: Innovator in Plasma Processing Technology

Introduction

Kazuyuki Iori is a notable inventor based in Kawasaki, Japan, recognized for his contributions to plasma processing technology. With a total of two patents to his name, Iori has made significant advancements in methods and devices that enhance plasma processing efficiency.

Latest Patents

Iori's latest patents include a plasma processing device and a plasma processing method, as well as a method of manufacturing an element that includes a substrate to be processed. These inventions aim to provide a plasma processing device and method that can easily adjust plasma density distribution while ensuring uniformity. In one embodiment, the inside of a vacuum vessel is divided by a grid with communication holes into a plasma generation chamber and a plasma processing chamber. Magnetic coils are arranged on the upper wall of the plasma generation chamber to direct magnetic field lines from the center of the vacuum vessel to the side wall. Additionally, ring-shaped permanent magnets are positioned outside the side wall of the plasma generation chamber to create a specific magnetic polarity.

Career Highlights

Kazuyuki Iori is currently employed at Canon Anelva Corporation, where he continues to innovate in the field of plasma processing. His work has contributed to the development of advanced technologies that are essential in various industrial applications.

Collaborations

Iori collaborates with notable colleagues, including Yukito Nakagawa and Masayoshi Ikeda, who contribute to his research and development efforts.

Conclusion

Kazuyuki Iori's work in plasma processing technology exemplifies the innovative spirit of modern inventors. His patents reflect a commitment to enhancing manufacturing processes through advanced technology.