Company Filing History:
Years Active: 1998-1999
Title: Kazuyoshi Manako: Innovator in Semiconductor Cleaning Technologies
Introduction
Kazuyoshi Manako is a prominent inventor based in Saga, Japan. He has made significant contributions to the field of semiconductor cleaning technologies. With a total of 2 patents, his work focuses on improving the efficiency and effectiveness of cleaning processes for semiconductor substrates.
Latest Patents
Manako's latest patents include innovative solutions for cleaning equipment and cleaning liquids used in semiconductor manufacturing. One of his patents describes a cleaning equipment for semiconductor substrates, which features a cleaning tank designed to remove impurities from the cleaning liquid. This equipment includes a pump and a filter unit to ensure the cleaning liquid is free from contaminants. Additionally, it incorporates a gas mixing device that adjusts the temperature of the cleaning liquid and dissolves gas into it, along with a gas-separating device to remove undissolved gas.
Another notable patent involves a semiconductor wafer cleaning liquid. This cleaning liquid consists of an aqueous hydrogen fluoride (HF) solution with a specific concentration and temperature, into which ozone is dissolved to enhance its cleaning properties. The method for cleaning semiconductor wafers includes several steps, such as preparing the cleaning liquid and rinsing the semiconductor substrate with pure or ozone-dissolved water.
Career Highlights
Kazuyoshi Manako is associated with Sumitomo Sitix Corporation, where he applies his expertise in semiconductor technologies. His work at the company has been instrumental in advancing cleaning processes that are critical for semiconductor manufacturing.
Collaborations
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Conclusion
Kazuyoshi Manako's contributions to semiconductor cleaning technologies highlight his innovative spirit and dedication to improving manufacturing processes. His patents reflect a deep understanding of the challenges in the semiconductor industry and offer practical solutions to enhance efficiency.