Location History:
- Kumamoto, JP (2020)
- Koshi, JP (2022)
Company Filing History:
Years Active: 2020-2022
Title: Kazuya Iwanaga: Innovator in Substrate Processing Technology
Introduction
Kazuya Iwanaga is a notable inventor based in Kumamoto, Japan. He has made significant contributions to the field of substrate processing, holding a total of 2 patents. His work focuses on enhancing the efficiency and effectiveness of substrate processing methods and apparatus.
Latest Patents
Iwanaga's latest patents include a substrate processing apparatus and a substrate processing method. The substrate processing apparatus features a substrate holder designed to hold a substrate with a concavo-convex pattern oriented upward. It includes a liquid supply unit that supplies processing liquid to form a liquid film in the concave portions of the pattern. Additionally, a heating unit irradiates the substrate or the liquid film with a laser beam for heating purposes. The heating controller manages the heating unit to ensure that the entire concave portion is exposed in depth from the processing liquid.
Another significant patent is a measurement processing device that controls an imaging device to capture images of a substrate. This device measures the cut width where the processing film is absent and the gap width between the substrate's peripheral edge and the enclosure member surrounding it.
Career Highlights
Kazuya Iwanaga is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His innovative work has contributed to advancements in substrate processing technologies, making him a valuable asset to his organization.
Collaborations
Iwanaga has collaborated with notable coworkers, including Shoichiro Hidaka and Boui Ikeda. Their combined expertise has fostered a productive environment for innovation and development in their field.
Conclusion
Kazuya Iwanaga's contributions to substrate processing technology through his patents and work at Tokyo Electron Limited highlight his role as a significant inventor in the industry. His innovative approaches continue to influence advancements in substrate processing methods and apparatus.