The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2020
Filed:
Nov. 24, 2015
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Yoshifumi Amano, Kumamoto, JP;
Yuki Ito, Kumamoto, JP;
Eiichiro Okamoto, Kumamoto, JP;
Kazuya Iwanaga, Kumamoto, JP;
Ryoji Ikebe, Kumamoto, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2017.01); G06T 7/62 (2017.01);
U.S. Cl.
CPC ...
G06T 7/0008 (2013.01); G06T 7/62 (2017.01); G06T 2207/30148 (2013.01);
Abstract
Disclosed is a measurement processing device including: a processing unit configured to control an imaging device to image a substrate, on which a processing film is removed from the peripheral edge portion, and an enclosure member that surrounds the substrate. A captured image obtained by the imaging device is processed to measure a cut width in which the processing film is absent in the peripheral edge portion of the substrate, and a gap width between a peripheral edge end of the substrate and the enclosure member.