Location History:
- Koshi, JP (2017)
- Kumamoto, JP (2017 - 2020)
Company Filing History:
Years Active: 2017-2020
Title: Eiichiro Okamoto: Innovator in Substrate Processing Technology
Introduction
Eiichiro Okamoto is a prominent inventor based in Kumamoto, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 6 patents. His work focuses on developing advanced measurement processing devices and substrate processing systems that enhance efficiency and precision in manufacturing processes.
Latest Patents
Okamoto's latest patents include a variety of innovative technologies. One of his notable inventions is a measurement processing device that features a processing unit designed to control an imaging device. This device images a substrate, specifically targeting the removal of a processing film from the peripheral edge portion. The captured images are processed to measure the cut width where the processing film is absent and the gap width between the substrate's peripheral edge and the surrounding enclosure member.
Another significant patent is for a substrate liquid processing apparatus. This apparatus includes a substrate rotary-holding unit that rotates the substrate while holding it securely. It also features a processing liquid supply unit that delivers a processing liquid to the substrate's bottom surface. The design incorporates a base plate and a cover member, which work together to manage air streams occurring below the substrate, ensuring optimal processing conditions.
Career Highlights
Eiichiro Okamoto is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at this organization has allowed him to push the boundaries of substrate processing technology, contributing to advancements that benefit various sectors.
Collaborations
Throughout his career, Okamoto has collaborated with talented individuals such as Yoshifumi Amano and Yuki Ito. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.
Conclusion
Eiichiro Okamoto's contributions to substrate processing technology exemplify his dedication to innovation and excellence. His patents reflect a commitment to improving manufacturing processes, making him a notable figure in the field.