This inventor holds 4 USPTO granted patents and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2001-2007.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Kumamoto-ken, JP (2001 - 2003)
- Kikuchi-gun, JP (2004 - 2007)
Company Filing History:
Years Active: 2001-2007
Title: Kazutoshi Yano: Innovator in Coating Technology
Introduction
Kazutoshi Yano is a prominent inventor based in Kikuchi-gun, Japan. He has made significant contributions to the field of coating technology, holding a total of 4 patents. His innovative approaches have advanced the methods used in the coating of films, particularly in semiconductor manufacturing.
Latest Patents
Yano's latest patents include a method of coating film, a coating unit, an aging unit, a solvent replacement unit, and an apparatus for coating film. These inventions focus on improving the efficiency and effectiveness of the coating process. Specifically, prior to the transfer of a wafer, a mixed gas is generated and exhausted to suppress fluctuations in concentration and temperature of the solvent component. The gelling step after the wafer is moved to the aging unit is divided into several stages. As the wafer reaches a predetermined treatment temperature, the average concentration of the solvent component in the mixed gas is gradually increased. This process prevents the gas of the solvent component from condensing immediately after the wafer is transferred into a sealed chamber.
Career Highlights
Kazutoshi Yano is currently employed at Tokyo Electron Limited, a leading company in the semiconductor equipment industry. His work has been instrumental in developing advanced technologies that enhance the performance of semiconductor devices.
Collaborations
Yano has collaborated with notable colleagues such as Kazuhiro Takeshita and Shinji Nagashima. Their combined expertise has contributed to the successful development of innovative coating technologies.
Conclusion
Kazutoshi Yano's contributions to coating technology have made a significant impact in the semiconductor industry. His innovative patents and collaborative efforts continue to drive advancements in this critical field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile