Location History:
- Aizuwakamatsu, JP (1982)
- Kawasaki, JP (1992)
Company Filing History:
Years Active: 1982-1992
Title: Innovations by Kazuo Tokitomo: Pioneering Advances in Photomasks
Introduction
Kazuo Tokitomo, an accomplished inventor based in Aizuwakamatsu, Japan, has made significant contributions to the field of photomask technology. With a portfolio of five patents, his work is instrumental in advancing the precision and efficiency of optical systems used in various applications, particularly in semiconductor manufacturing.
Latest Patents
Among Tokitomo's latest innovations are groundbreaking patents that focus on the fabrication of photomasks. One such patent describes a method to create a photomask for ultraviolet light that achieves a contrast of 10 or larger. This innovation involves irradiating a calcium fluoride crystal substrate with a KrF excimer laser, generating a color center that corresponds to an original photomask pattern. Additionally, another noteworthy patent involves the creation of a reticle for photolithographic patterning. This reticle features a substrate that is transparent to an optical beam, complemented by an opaque layer that selectively interrupts the beam according to a desired pattern. A phase shift pattern, made of an electrically conductive material, aids in canceling diffraction for enhanced optical performance.
Career Highlights
Kazuo Tokitomo currently works at Fujitsu Corporation, where he continues to push the boundaries of innovation in electronic and optical technologies. His work is pivotal in enhancing the quality and effectiveness of semiconductor production processes.
Collaborations
Throughout his career, Tokitomo has collaborated with notable colleagues, including Toshio Kurahashi and Yasutaka Ban. Their collective expertise and teamwork have significantly contributed to the innovative advancements in their field.
Conclusion
Kazuo Tokitomo stands out as a prominent figure in the realm of photomask technology. His patents showcase his commitment to improving the precision in semiconductor manufacturing processes. As innovations continue to evolve, Tokitomo's contributions will undoubtedly play a vital role in shaping the future of optical technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.