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Minato-ku, Japan

Kazuo Sawai

USPTO Granted Patents = 4 (Patent Applications = 1)

Average Co-Inventor Count = 2.6

ph-index = 2

Forward Citations = 10(Granted Patents)

Location History:

Minato-ku, JP (2011 - 2013)
Sendai, JP (2016)

Company Filing History:

4 out of 10,326

Tokyo Electron Limited

Years Active: 2011-2016

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4 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 9396911 - Determination method, control method, determination apparatus, pattern forming system and program (2016-07-19),

2. 8500950 - Exposure condition setting method, substrate processing apparatus, and computer program (2013-08-06),

3. 8007968 - Substrate processing method, program, computer-readable storage medium and substrate processing system (2011-08-30),

4. 7960078 - Exposure condition setting method, substrate processing device, and computer program (2011-06-14),

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