This inventor holds 40 USPTO granted patents and 1 EPO patent, primarily in Thin Film Technology. Top assignees: Asm IP Holding B.v., Asahi Glass Company, Limited, Kabushiki Kaisha Toshiba. Active years: 1984-2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Ebina, JP (1984 - 1988)
- Yokohama, JP (1993 - 2008)
- Chiba-ken, JP (2009)
- Chiyoda-ku, JP (2011)
- Kawasaki, JP (2010 - 2021)
Company Filing History:





Years Active: 1984-2026
Areas of Expertise:
Title: Kazuo Sato: A Pioneer in Substrate Processing Technologies
Introduction
Kazuo Sato, based in Yokohama, Japan, is a renowned inventor with an impressive portfolio of 39 patents. His contributions primarily focus on advancements in substrate processing technologies that play a critical role in semiconductor manufacturing and other sectors requiring precise deposition techniques.
Latest Patents
Among his latest innovations are two notable patents that showcase his ingenuity. The first is a "Shower Plate Structure for Supplying Carrier and Dry Gas." This invention includes a shower plate designed for a plasma deposition apparatus, featuring multiple apertures that facilitate the passage of carrier gas to the chamber. The design enhances the efficiency of gas distribution, crucial for optimal substrate processing.
The second patent, the "Substrate Processing Apparatus," outlines a sophisticated setup that includes a chamber, a susceptor, and a unique flow control ring. This apparatus not only optimizes substrate treatment but also integrates a metal film formation process, further enhancing its utility in industrial applications.
Career Highlights
Kazuo Sato has worked with prestigious companies such as ASM IP Holding B.V. and Asahi Glass Company, Limited. His tenure at these organizations highlights his role in developing cutting-edge technologies within the substrate processing domain. His experiences have significantly influenced his innovative contributions, as he consistently pushes the boundaries of what is possible in his field.
Collaborations
Throughout his career, Sato has collaborated with talented individuals, including Takayuki Yamagishi and Naoto Tsuji. These partnerships have fostered an environment of creativity and technical excellence, allowing for the successful realization of complex inventions and patents.
Conclusion
Kazuo Sato's work in substrate processing technologies has had a profound impact on the industry. His 39 patents stand as a testament to his innovative spirit and dedication to advancement in technology. As he continues to develop new solutions and collaborate with other experts, the influence of his contributions will undoubtedly be felt for years to come.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile