Yokohama, Japan

Kazuo Sato



Average Co-Inventor Count = 3.5

ph-index = 19

Forward Citations = 6,865(Granted Patents)


Location History:

  • Ebina, JP (1984 - 1988)
  • Yokohama, JP (1993 - 2008)
  • Chiba-ken, JP (2009)
  • Chiyoda-ku, JP (2011)
  • Kawasaki, JP (2010 - 2021)

Company Filing History:


Years Active: 1984-2021

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39 patents (USPTO):Explore Patents

Title: Kazuo Sato: A Pioneer in Substrate Processing Technologies

Introduction

Kazuo Sato, based in Yokohama, Japan, is a renowned inventor with an impressive portfolio of 39 patents. His contributions primarily focus on advancements in substrate processing technologies that play a critical role in semiconductor manufacturing and other sectors requiring precise deposition techniques.

Latest Patents

Among his latest innovations are two notable patents that showcase his ingenuity. The first is a "Shower Plate Structure for Supplying Carrier and Dry Gas." This invention includes a shower plate designed for a plasma deposition apparatus, featuring multiple apertures that facilitate the passage of carrier gas to the chamber. The design enhances the efficiency of gas distribution, crucial for optimal substrate processing.

The second patent, the "Substrate Processing Apparatus," outlines a sophisticated setup that includes a chamber, a susceptor, and a unique flow control ring. This apparatus not only optimizes substrate treatment but also integrates a metal film formation process, further enhancing its utility in industrial applications.

Career Highlights

Kazuo Sato has worked with prestigious companies such as ASM IP Holding B.V. and Asahi Glass Company, Limited. His tenure at these organizations highlights his role in developing cutting-edge technologies within the substrate processing domain. His experiences have significantly influenced his innovative contributions, as he consistently pushes the boundaries of what is possible in his field.

Collaborations

Throughout his career, Sato has collaborated with talented individuals, including Takayuki Yamagishi and Naoto Tsuji. These partnerships have fostered an environment of creativity and technical excellence, allowing for the successful realization of complex inventions and patents.

Conclusion

Kazuo Sato's work in substrate processing technologies has had a profound impact on the industry. His 39 patents stand as a testament to his innovative spirit and dedication to advancement in technology. As he continues to develop new solutions and collaborate with other experts, the influence of his contributions will undoubtedly be felt for years to come.

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