Asm IP Holding B.v.

Asahi Glass Company, Limited

Kabushiki Kaisha Toshiba

Fujitsu Corporation

Tokyo Shibaura Denki Kabushiki Kaisha

Mitsubishi Jukogyo Kabushiki Kaisha

Kabushiki Kaisha Kobe Seiko Sho

Asm IP Holdings B.v.

Kazuo Sato

Takayuki Yamagishi

Naoto Tsuji

Yasunobu Onishi

Masami Miyazaki

Makoto Fukawa

Mika Kambe

Akira Mitsui

Rumiko Hayase

Nobutaka Aomine

Kenji Chiba

Junichi Ebisawa

Yasuo Hayashi

Hirokazu Niki

Naohiko Oyasato

Takao Hayashi

Hiromichi Nishimura

Naoki Taneda

Jun Kawahara

Atsushi Hayashi

Yukio Yoshikawa

Satoru Takaki

Yoshitaka Muraoka

Masataka Miyamura

Wataru Adachi

Ryoko Yamada

Hidehiko Fuchida

Katsuaki Aikawa

Shuko Saito

Yuki Kawamura

Tomohiko Maeda

Masao Higeta

Hiromitsu Wakabayashi

Takeshi Morimoto

Toshihiro Kugimiya

Hiroyuki Fujita

Yoshihito Kobayashi

Masanori Arata

Daisuke Hiramatsu

Takashige Yoneda

Kazushi Hayashi

Satoshi Takeda

Yuzo Okuyama

Takafumi Nakahama

Fumiaki Gunji

Akitoshi Kumagae

Hiroki Honda

Junichi Kageyama

Takashi Kobori

Shizuo Yasuda

Satoshi Okuno

Susumu Nishikawa

Kuniyuki Araki

Yamato Tachibana

Junichi Sato, Legal Representative

Toshihisa Gouda

Ryuhei Motono

Kazuo Takeoka

Kunihiko Adachi

Tsuneo Watanabe

Masanao Namba

Mikio Kumagai

A shower plate for a plasma deposition apparatus, the shower plate including: a plurality of apertures each extending from a rear surface of the shower plate to a front surface for passing a carrier gas therethrough in this direction to a chamber, a plurality of first apertures each extending from a first connecting aperture to an inner part of the front surface for passing gas therethrough in this direction to the chamber, and a plurality of second apertures each extending from a second connecting aperture to an outer part of the front surface for passing gas therethrough in this direction to the chamber, wherein the first connecting aperture connects the first apertures to at least one first aperture extending from a sidewall side of the shower plate and the second connecting aperture connects the second apertures to at least one second aperture extending from the sidewall side.

Shower plate structure for supplying carrier and dry gas

Examples of a substrate processing apparatus includes a chamber, a susceptor provided in the chamber, a flow control ring of an insulator that is mounted on the chamber and surrounds the susceptor, a shower plate opposed to the susceptor, and a metal film that is formed on a lower surface of the flow control ring while exposing an upper surface of the flow control ring, and is in contact with the chamber.

Substrate processing apparatus

A shower plate adapted to be installed in a plasma deposition apparatus including a gas inlet port, a shower head, a reaction chamber and an exhaust duct, the shower plate being adapted to be attached to the showerhead and having: a front surface adapted to face the gas inlet port; and a rear surface opposite to the front surface, wherein the shower plate has multiple apertures each extending from the front surface to the rear surface, and wherein the shower plate further has at least one aperture extending from the front surface side of the shower plate to the exhaust duct.

Shower plate structure for exhausting deposition inhibiting gas

Shower plate

A film forming apparatus includes a susceptor, and a shower head provided above the susceptor and having a first passage and a second passage independent of the first passage formed therein, wherein the first passage is formed through the shower head by being provided with a first cavity surrounded by a first upper wall and a first lower wall, a first thin hole formed in the first upper wall, and a plurality of second thin holes formed in the first lower wall, the height of the first upper wall in the vertical direction is reduced with increase in distance from the first thin hole, and the second passage is formed in the same manner as the first passage.

Film forming apparatus

Top plate

Seal ring

Heater block

Growing community of inventors

Yokohama, Japan

Kazuo Sato