Company Filing History:
Years Active: 1998
Title: Kazuo Mamada: Innovator in Semiconductor Technology
Introduction
Kazuo Mamada is a notable inventor based in Annaka, Japan. He has made significant contributions to the field of semiconductor technology, particularly through his innovative patent related to heat treatment jigs.
Latest Patents
Kazuo Mamada holds a patent for a heat treatment jig for semiconductor wafers. This invention involves a method for treating a silicon nitride layer, where the layer is thermally grown on the surface of a jig composed of silicon or silicon carbide in a nitrogen ambience. The process occurs within a temperature range of 1,100°C to 1,300°C. It is recommended to slightly remove the surface of the jig through hydrogen etching before the thermal growth of the silicon nitride layer. Additionally, a silicon oxide layer can be thermally grown on the jig surface in an oxygen ambience prior to the growth of the silicon nitride layer.
Career Highlights
Kazuo Mamada is associated with Shin-Etsu Handotai Co., Ltd., a leading company in the semiconductor industry. His work has been instrumental in advancing the technology used in semiconductor manufacturing.
Collaborations
Kazuo Mamada has collaborated with notable coworkers, including Norihiro Kobayashi and Yuichi Matsumoto. Their combined expertise has contributed to the success of various projects within the company.
Conclusion
Kazuo Mamada's innovative work in semiconductor technology, particularly his patent for a heat treatment jig, showcases his significant contributions to the field. His collaborations and career at Shin-Etsu Handotai Co., Ltd. further highlight his impact on the industry.